| 发明名称 |
Photoelectron image projection apparatus. |
| 摘要 |
<p>A photoelectron image projection apparatus has a device (30, 50) for detecting an image of a pattern of a mask (4) within a predetermined projection region of the mask. An image signal describing the detected image is compared with a reference image signal which is known from the pattern of the mask, and a defect in the projection pattern is detected when the two compared image signals differ.</p> |
| 申请公布号 |
EP0306275(A2) |
申请公布日期 |
1989.03.08 |
| 申请号 |
EP19880308029 |
申请日期 |
1988.08.31 |
| 申请人 |
FUJITSU LIMITED |
发明人 |
YAMADA, AKIO;YASUDA, HIROSHI;SAKAMOTO, KIICHI;KUDO, JINKO |
| 分类号 |
G03F9/00;G03F7/26;H01J37/30;H01L21/32 |
主分类号 |
G03F9/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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