| 摘要 |
PURPOSE:To efficiently perform precise thinning machining and precise symmetrical degree machining of silicone wafers, etc., by interposing a freezing layer between a supporting surface and a raw material and freezingly depositing the raw material onto the supporting surface and machining the material in this state. CONSTITUTION:A finishing table 5 consists of a vertically movable rotary board 4 whose surface 3 faces a supporting surface 2 (table surface) of a rotary table 1. On the supporting surface 2 is placed a water-containing sheet 4a, on which silicone wafers 7 are placed and pressed against the surface 2. Further, the surface 2 is supported in water in a container and, in this state, wafers 7 are held at a certain interval apart from the surface 2, the water is frozen to form a frozen layer, the raw material 7 is freezingly deposited onto the surface 2, and in this state, the raw material 7 is machined. In this case, the frozen layer is very thin and able to maintain the bottom surface of the raw material 7 parallel to the surface 2. Thus, the precise thinning machining and precise symmetrical degree machining of raw materials can be effectively performed. |
