发明名称 Method of manufacturing an embedded type semiconductor laser
摘要 In an embedded type semiconductor laser, at least three layers of a first conduction type clad layer, a quantum well active layer which contains a first or second conduction type or a pn junction, and a second conduction type clad layer, are grown successively on a first conduction type substrate. A high concentration impurity doped layer is provided excluding a predetermined striped region, situated adjacent to the active layer. An impurity diffusion is carried out by heat treatment which diffuses dopant from the high concentration impurity doped layer to the active layer.
申请公布号 US4810670(A) 申请公布日期 1989.03.07
申请号 US19860943760 申请日期 1986.12.19
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 FURUYAMA, HIDETO;KUROBE, ATSUSHI
分类号 H01L21/308;H01L21/306;H01L33/00;H01S5/00;H01S5/06;H01S5/20;H01S5/34;(IPC1-7):H01L21/203 主分类号 H01L21/308
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