Method of adjusting bridge circuit of semiconductor pressure sensor

摘要

A method of adjusting a bridge circuit of a semiconductor pressure sensor comprises the steps of providing conductive lines connected to at least one of diffused resistors at predetermined intervals during the wiring process, the diffused resistors being provided to connect strain gauge resistors constituting the bridge circuit; adjusting the resistance value of at least the one of the diffused resistors; making vacuum suction to the back surface of a diaphragm of the semiconductor pressure sensor in the testing process to make a state wherein pressure is virtually applied to the diaphragm from the surface side thereof; measuring the pressure sensitivity of the semiconductor pressure sensor from the surface side of the diaphragm by making use of the bridge circuit; and adjusting the resistance value of at least the one of the diffused resistors based on the pressure sensitivity thus measured to adjust the balance of the bridge circuit.