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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPS6459950(A)
申请公布日期
1989.03.07
申请号
JP19870217094
申请日期
1987.08.31
申请人
HITACHI LTD
发明人
KOIZUMI TORU
分类号
H01L21/8222;H01L21/28;H01L21/331;H01L27/06;H01L29/73;H01L29/732
主分类号
H01L21/8222
代理机构
代理人
主权项
地址
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