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经营范围
发明名称
DRY ETCHING
摘要
申请公布号
JPS6459820(A)
申请公布日期
1989.03.07
申请号
JP19870215293
申请日期
1987.08.31
申请人
TOKUDA SEISAKUSHO LTD
发明人
HARA HIROYUKI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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