| 摘要 |
PURPOSE:To manufacture a superconducting coil of thin film by a method wherein a thin film made of an oxide superconducting material is formed on a substrate, the oxide superconducting material is left in belt-like form by removing said material by selectively projecting a laser beam, and the material having non-superconducting characteristics is laminated under or on the oxide superconducting material. CONSTITUTION:An oxide superconducting thin film 2 of 0.1-50mum, 20mum for example, in thickness is formed on a disc-shaped substrate 1 by conducting a sputtering or printing method. A heat-treatment is performed thereon in an oxygen atmosphere, a superconducting ceramic film is formed, and an excimer laser beam 4 is projected. This laser beam is scanned (11) from the left end to the center part, and the disc-shaped substrate is rotated (12) and a groove 3 is formed. After a single-layer wiring has been formed, an oxide nonsuperconducting thin film 6 is formed on the whole surface of the above- mentioned substance, the second oxide superconducting thin film 7 is laminated, and the second oxide superconducting thin film is connected to laser-scribed coils 7-1, 7-2,... at the connection part 8. Then, a strip-shaped wire is wired in disc-like form, and its multilayer winding can be conducted. |
