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发明名称
CHARGED BEAM DEVICE
摘要
申请公布号
JPS6459749(A)
申请公布日期
1989.03.07
申请号
JP19870215089
申请日期
1987.08.31
申请人
MITSUBISHI ELECTRIC CORP
发明人
IWAMI TAIZO;MURAKAMI EISHIN;YASUNAGA MASASHI
分类号
H01L21/027;H01J37/24;H01J37/30;H01J37/305;H01L21/30
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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