| 摘要 |
PURPOSE:To improve the frequency response of the titled sensor by controlling the distance between the free end of a cantilever and a protection wall to a proper value and setting a cutoff frequency to an optional value. CONSTITUTION:The sensor element consisting of a pedestal 700 and the cantilever 800 is mounted on a steam 100. The cantilever 800 has a thin diaphragm 801 with a semiconductor strain gauge and the thick free end 802 and a load 803 is adhered to the free end 802. A recessed part 701 for allowing the displacement of the free end 802 of said cantilever is formed in the pedestal 700. The distance (h) between the bottom part of this recessed part and the load 803 or the distance between the free end 802 and the reverse surface of a stopper 200 is set to the best value according to a prescribed arithmetic equation so as to obtain a desired cutoff frequency fC. |
