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发明名称
CLEAN ROOM
摘要
申请公布号
JPS6458947(A)
申请公布日期
1989.03.06
申请号
JP19870216763
申请日期
1987.08.31
申请人
HITACHI LTD
发明人
TSUZUKI KOICHI;TSUMAKI NOBUO;UNO MOTOO;OTAKA KENJI
分类号
F24F7/007;F24F7/06
主分类号
F24F7/007
代理机构
代理人
主权项
地址
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