发明名称 PRESSURE HEAD FOR SURFACE GRINDING DEVICE
摘要 PURPOSE:To enable a pressurized force from a pressure head to constantly and uniformly act on works and improve the grinding accuracy by mounting a mounting block through flexible pads bonded on the lower surface of the pressure head. CONSTITUTION:Works 16 attached to a mounting block 15 are pressed through pads 14 against the upper surface of a surface plate 11 by a pressure head 12, and ground and machined by the surface plate 11. In this instance, although the surface plate 11, the pressure head 12, the mounting block 15, etc. are heated and deformed by heat produced during grinding operation, the pressurized force from the pressure head 12 is positively transmitted through the pads 14 to the block 15. At the same time, very small relative displacements between each member caused by heat-deformation are absorbed by the pads 14, and the pressurized force from the pressure head 12 uniformly acts on the works 16. As a result, the works 16 are pressed against the surface plate 11 by uniform forces.
申请公布号 JPS6458474(A) 申请公布日期 1989.03.06
申请号 JP19870212263 申请日期 1987.08.26
申请人 SPEEDFAM CO LTD 发明人 FURUKAWA SHUICHI
分类号 B24B7/07;B24B37/005 主分类号 B24B7/07
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