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发明名称
PROCESS FOR MODIFYING SURFACE OF FINE PARTICLE
摘要
申请公布号
JPS6456138(A)
申请公布日期
1989.03.03
申请号
JP19870210996
申请日期
1987.08.24
申请人
NEC CORP
发明人
ICHIHASHI TOSHIYA
分类号
B01J19/00;C23C16/48;H01L21/203;H01L21/205
主分类号
B01J19/00
代理机构
代理人
主权项
地址
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