| 摘要 |
PURPOSE:To provide a novel polysilane composed of a (co)polymer containing a specific constituent unit, soluble in a polar solvent such as methanol, acetone and water and useful for a photo-sensitive composition developable with an alkali and capable of forming a fine pattern. CONSTITUTION:The objective silane is composed of a (co)polymer having constituent unit of formula [R1 and R2 are (un)substituted aromatic group of (un) substituted alkyl]. The silane can be produced by mixing (A) a dichlorosilane having a alcohol or phenol group protected with trimethylsilyl group with (B) a sodium dispersion in toluene at 100-120 deg.C, filtering the reaction product, adding (C) methanol to the filtrate to effect hydrolysis, subjecting the product to concentration and fractional precipitation to obtain a polysilane, reacting the polysilane with (D) an amine in (E) THF, precipitating the reaction product in an HCl solution, producing a polymer by fractional precipitation and drying the obtained polymer. |
