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发明名称
MOLECULAR BEAM SOURCE
摘要
申请公布号
JPS6456397(A)
申请公布日期
1989.03.03
申请号
JP19870212745
申请日期
1987.08.28
申请人
HITACHI LTD
发明人
GOSHIMA SHIGEO;MISHIMA TOMOYOSHI;TAGAMI TOMONORI;KAWADA MASAHIKO
分类号
C30B23/08;C30B29/40;H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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