| 摘要 |
PURPOSE:To make it possible to perform a partial exchange of the gas quantitatively in a gas laser tube even when a gas laser oscillator is operated for a long time by a method wherein the pressure in the gas laser tube in motion is detected and a control means for exchanging the gas in the gas laser tube on the basis of the pressure value is provided. CONSTITUTION:A gas pressure sensor 5 for detecting a gas pressure in a gas laser tube 1, an exhaust valve 10, which is mounted to the tube 1 and exhausts gas in the tube 1 to the outside of the tube, and a gas supply valve 8, which is mounted to the tube 1 and supplies gas into the interior of the tube 1, are provided. Moreover, a control means 7; which computes the exchange amount of gas in the tube 1 on the basis of a pressure value in the tube 1 in motion, which is obtained from the above sensor 5, and opens and shuts the above valves 10 and 8 to exchange gas of an amount equivalent to the value; is provided. Thereby, the partial exchange of gas can be always performed quantitatively without being affected by an increase in the gas pressure in the tube due to a temperature rise in the gas laser tube. |
