| 摘要 |
PURPOSE:To obtain a multilayer ceramic substrate using a superconductive material, which is not generated a voltage fluctuation by a large current at the time of switching, by a method wherein (YBa2)Cu3O7 is used as the superconductive material, a specified amount of Pbo- containing Al2O3 is used as an insulating material and the densities of insulating material green sheets are adjusted highly in such a way that the amounts of shrinkage of the materials due to sintering become equal to each other. CONSTITUTION:In case a multilayer ceramic substrate, wherein a superconductive material is used as the material for a power layer 1 and which consists of the layer 1 and insulating layers 4 for forming wirings, is manufactured by a wet lamination method, (YBa2)Cu3O7 is used as the superconductive material, 5-15wt.% of PbO-containing Al2O3 is used as an insulating material and the densities of insulating material green sheets are adjusted highly in such a way that the sintered shrinkage amounts of the materials become equal with each other. For example, through holes 2 are punched in the green sheets 4 adjusted their densities to a density of 2.74g/cm<3> by adding 10 parts weight of lead oxide to 90 parts weight of alumina powder to fill palladium conductor pastes 2' in the holes 2 and the wirings 3 are printed on one surface of each layer 4 with a palladium conductor paste. Then, the layers of the alumina green sheets 4, the layer of the superconductive powder green sheet 1 and the layer of the alumina greent sheet 1 are laminated and are sintered at 975 deg.C. |
