发明名称 BONDING METHOD AND DEVICE
摘要 PURPOSE:To conduct bonding not peeled after joining by installing a film heater to an arm, to which a jig supporting a wire as a body to be bonded is mounted, and heating the wire through the arm and the jig. CONSTITUTION:A wire 11 is penetrated through a capillary 6 through a clamper 14. A film heater 3 is conducted and a conductor 4 is heated, the nose of a first arm 2 is heated, and the wire 11 is heated through the capillary 6. The tip of the wire 11 is melted, and supported as heat transfer from the capillary 6 is left as it is kept. Since a lead frame as a bonding body is heated and a fixed temperature is kept, on the other hand, the dispersion of a contact bonding temperature is reduced when the wire is joined, and the wire can be joined at a desired contact bonding temperature, thus improving contact bonding properties, then preventing peeling after bonding and enhancing reliability.
申请公布号 JPS6454742(A) 申请公布日期 1989.03.02
申请号 JP19870210123 申请日期 1987.08.26
申请人 HITACHI LTD;HITACHI YONEZAWA ELECTRON CO LTD 发明人 HASEGAWA TAKESHI
分类号 H01L21/607;H01L21/60 主分类号 H01L21/607
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