| 摘要 |
A device for measuring fluid density, the device comprising a silicon substrate (1) having a micro-engineered cantilevered beam (2) fabricated on it for use as a density sensor. The beam (2) is at the end of a tube (5) and has a contact (3) manufactured on its end and a contact (4) manufactured on the substrate (1) below the contact (3). Means (not shown) for causing said structure to vibrate and for detecting a characteristic of the vibration are provided, the characteristic being dependent on the density of the fluid to be measured. |
