| 发明名称 |
APPARATUS FOR DENDRITIC WEB GROWTH SYSTEMS |
| 摘要 |
A method and apparatus for growing dendritic web crystals at increased growth rates is disclosed in which a sublid is used to maintain a sufficiently hot silicon melt surface temperature to insure stable web growth, while simultaneously permitting more efficient heat transfer from the growing dendritic web to the cooler susceptor lid. |
| 申请公布号 |
AU2062788(A) |
申请公布日期 |
1989.03.02 |
| 申请号 |
AU19880020627 |
申请日期 |
1988.08.08 |
| 申请人 |
WESTINGHOUSE ELECTRIC CORPORATION |
发明人 |
ROLV HUNDAL;RAYMOND GEORGE SEIDENSTICKER;JAMES PAUL MCHUGH |
| 分类号 |
C30B15/00;C30B15/14;C30B15/34;C30B29/06;C30B29/64;H01L21/208;(IPC1-7):C30B15/10 |
主分类号 |
C30B15/00 |
| 代理机构 |
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代理人 |
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| 地址 |
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