| 摘要 |
<p>PURPOSE:To obtain a ruthenium oxide group thin-film, the surface of which is smoothed and a resistance value of which is not dispersed, by applying a chemically stable mixed solution composed of ruthenium octylate and the octylate of alkali earth metals onto a substrate and drying the mixed solution and heating and baking the dried mixed solution. CONSTITUTION:1.21g of barium changed into the octylate of alkali earth metals and 1.00g of ruthenium octylate are dissolved into a solvent composed of 8.5g of n-butyl acetate, and washed by an alkaline detergent, and the surface of a sodalime glass plate rinsing-treated by pure water is spin-coated with the washed mixed solution in thickness of approximately 1.1mm. The glass plate surface is dried at room temperature-100 deg.C, and heated for thirty min in an electric furnace brought to 500 deg.C, thus acquiring a ruthenium oxide group thin- film. Accordingly, the thin-film being excellent in all of uniformity, stability and film formability and having superior resistivity of 2.50X10<-2> is obtained.</p> |
