| 摘要 |
PURPOSE:To improve a boundary characteristic between an electrode layer and a semiconductor layer and to economically form a thin film solar cell having high reliability by coating the surface of the activated semiconductor layer with conductive paste and baking the electrode layer. CONSTITUTION:Rectangular first electrode layers 21, 22,... of transparent conductive film are patterned on a glass substrate 1, a P-type a-SiC layer, an i-type a-Si layer, an n-type A-SiC layer are laminated by a plasma CVD method, patterned to form amorphous semiconductor layers 31, 32,.... Then, this substrate is dipped in mixture solvent of ethyl alcohol, isopropyl alcohol, acetone, etc. to be dried to activate the surfaces of the layers 31, 32, coated with conductive paste including metal powder and carbon powder and baked. Then, an ohmic junction is formed between boundaries to form second electrodes 41, 42,... having small series resistance, high conversion efficiency and high boundary density strength. Thus, a thin film solar cell having high reliability and improved boundary characteristic between the electrode layer and the amorphous semiconductor layer is economically formed. |
