发明名称 MANUFACTURE OF PIEZOELECTRIC FILM
摘要 PURPOSE:To obtain a sufficient moisture-proof effect and avoid the degradation of working efficiency by a method wherein a plurality of rows of conductive stripe metal films are formed on both the surfaces of a film substrate rolled and formed continuously with first gaps between each other and coating films are applied with second gaps between each other and the metal films and the coating films are cut off along the second gap and the first gap. CONSTITUTION:First, a filmy substrate 1 showing piezoelectricity is formed continuously with predetermined thickness and dimensions. Then masks are applied to both the surfaces of the filmy substrate 1 to form a plurality of rows of first gaps 3 parallel to the substrate surface and metal films 4 used as electrodes are evaporated over the masks. After a polarization treatment is carried out under a high voltage application, the outer surfaces are covered with moisture-proof coating films 5 with second gaps 6 between each other. In other words, parts not covered with the moisture-proof coating films 5 and parts covered with the coating films 5 and parts coated with the evaporated metal films 4 and parts not coated with the metal films 4 are provided. Then the filmy substrate 1 and the moisture-proof coating film 5 are cut along the approximate center line of the first gap 3 and, further, the filmy substrate 1 and the metal films 4 are cut along the approximate center line of the second gap 6.
申请公布号 JPS6453587(A) 申请公布日期 1989.03.01
申请号 JP19870211946 申请日期 1987.08.25
申请人 SHARP CORP 发明人 YAMAMOTO NORIMASA
分类号 H01L41/45 主分类号 H01L41/45
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