| 摘要 |
PURPOSE:To facilitate the optical design and optical axis adjustment of the optical deflecting device by forming a reflecting surface which reflects a light beam made incident at a specific angle of incidence toward diffraction gratings for light incidence integrally with the surface of a substrate. CONSTITUTION:The diffraction gratings 19 for light incidence are so formed that when the angle of incidence of a light beam projected on one plane perpendicular to an optical waveguide 11 is phi, incidence coupling efficiency (diffraction efficiency) is maximum; and diffraction gratings 19 for light projection are formed so that when the angle of projection of the light beam projected on the plane is phi, projection coupling efficiency is maximum. The opposite surface of the substrate 16 from its optical waveguide installation side is formed in parallel to the optical waveguide 11. Then the reflecting surface which reflects the light beam made incident at the angle phi of incidence toward the diffraction gratings 19 for light incidence is formed integrally with the surface of the substrate 16. The incident beam and projection beam are therefore settable in parallel to each other while projected on one plane. Consequently, the optical design and optical axis adjustment of the device are facilitated. |
