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发明名称
SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPS6453552(A)
申请公布日期
1989.03.01
申请号
JP19870210605
申请日期
1987.08.25
申请人
MITSUBISHI ELECTRIC CORP
发明人
KUSAKABE KENJI;YAMAUCHI KEIJI
分类号
H01L21/208;H01L21/322
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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