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发明名称
CHARACTER MEASUREMENT FOR ABRASIVE CLOTH
摘要
申请公布号
JPS6454255(A)
申请公布日期
1989.03.01
申请号
JP19870211193
申请日期
1987.08.25
申请人
SPEEDFAM CO LTD
发明人
TANI KAZUNORI
分类号
G01L5/00;G01N33/40
主分类号
G01L5/00
代理机构
代理人
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地址
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