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发明名称
METHOD OF MANUFACTURING A SEMI-CONDUCTOR DEVICE COMPRISING DIELECTRIC ISOLATION REGIONS
摘要
申请公布号
EP0091507(B1)
申请公布日期
1989.03.01
申请号
EP19820109009
申请日期
1982.09.29
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
KAMEYAMA, SHUICHI
分类号
H01L21/76;H01L21/31;H01L21/762;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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