| 摘要 |
<p>PURPOSE: To obtain swinging displacement with high resolution and high accuracy by providing radially arranged cantilevers and fixing a swinging plate to the front end sections of the cantilevers and a piezoelectric element to a supporting section, and then, fixing the element to the cantilevers by means of connecting sections. CONSTITUTION: A swinging stage is composed of supporting sections formed of hinges 1 and 2, intermediate sections 4, cantilevers 6 having the intermediate sections 4 and front end sections 5, a swinging plate 7 fixed to the front end sections 5 of the cantilevers 6, piezoelectric elements 8 fixed to the supporting sections 3 of the cantilevers 6, and connecting sections 10 which is fitted to the mobile sections of the elements 8 and fixed to the intermediate sections 4 of the cantilevers 6 through hinges 9. When a voltage is applied across the element 8, linear forward displacement (s) is generated and converted into angular displacement (t) around the hinge 1 by means of a link mechanism constituted of the supporting sections 3, hinges 1, intermediate sections 4, and the hinges 9 of the sections 10. The intermediate sections 4 transmit the displacement (t) to the front end sections 5 through the hinges 2 and make the plate 7 to generate swinging displacement. Since the swinging stage does not contain any joint section, the stage can be formed with high dimensional accuracy and swinging displacement can be obtained with high resolution and high accuracy.</p> |
