| 摘要 |
<p>PURPOSE: To provide a swinging stage which has no joint section, is formed with high dimensional accuracy, and has high resolution and high accuracy by providing integrally formed three four-node links instead of a hollow disk or columnar elastic springs for supporting a swinging plate. CONSTITUTION: A swinging stage is provided with three four-node links 6 each of which has four. hinges 2, 3, 4, and 5 and a base 1 as a fixed section, a piezoelectric element 8 fixed to the fourth hinge 5 and base 1 on both sides, and a swinging plate 13 which is fixed to an output section 10 held between the second and third hinges 3 and 4 through a fifth hinge 12. When a voltage is applied across the element 8, straight forward displacement (s) causes a fine displacement link mechanism constituted of the link of the hinges 2, 3, 4, and 5, intermediate sections 9 and 11, and the output section 10 to generate the displacement (t) of the output sections 10 and the displacement (t) is transmitted to the plate 13 as swinging displacement through a hinge 12. Therefore, the fine displacement of the element 8 can be transmitted stably to the plate 13 without slipping nor backlash.</p> |
