| 摘要 |
PURPOSE:To form an elaborate superconductive film with good quality at a low temperature by depositing a specific composite ceramic superconductor made of oxide, fluoride, and sulfide or the like as a thin film on a noncrystalline substrate with a metal film. CONSTITUTION:A compound film 13 made of an oxide containing A, B, Cu at the element ratio within the range of the equation I and substituted with at least one kind of fluorine, sulfur, selenium, tellurium, and polonium for part of the oxygen component. In the equation I, A is at least one kind of Sc, Y, and lanthanoide series elements (atomic number 57-71), and B is at least one kind of IIa group elements such as Ba, Sr, Ca, Be, Mg. The processing temperature is lowered and the superconductivity transition temperature is raised by using composite ceramic, and a superconductive film is deposited peculiarly elaborately and flat on the metal film coated on the noncrystalline substrate. A superconductor with high precision is thereby obtained.
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