摘要 |
PURPOSE:To obtain a superconductive thin film with high stability by depositing the first film mainly made of a ternary compound containing at least two kinds of specific elements and Cu on a crystalline substrate and covering the surface of the first film with the second film with the oxygen feeding property. CONSTITUTION:The first film 12 mainly made of a composite compound which is an oxide containing at least the element A, element B, and Cu at the mole ratio of elements of 0.5<=[(A+B)/Cu]<=2.5, the surface of the first film 12 is covered with the second film 14 with the oxygen feeding property, where A is at least one kind of Sc, Y, and lanthanoide series elements (atomic number 57-71), and B is at least one kind of IIa group elements. A superconductive thin film with high stability is thereby obtained. |