PROCESS FOR PRODUCING POROUS REFRACTORY METAL LAYERS EMBEDDED IN SEMICONDUCTOR DEVICES AND DEVICES PRODUCED THEREBY

摘要

A process for fabricating a semiconductormetal-semiconductor electronic device and the device formed thereby from a semiconductor substrate is described. The substrate forms a first active region of the device. A porous layer of conductive material is deposited on the substrate preferably by molecular beam epitaxy forming a control region. A layer of a semiconductor material epitaxially matched to the substrate is then grown on the layer of conductive material so that the layer of semiconductor material forms a second active region of an electronic device.