Apparatus for transferring small amount of fluid

摘要

An apparatus for transferring a small amount of fluid has at least three vibration pump units which are connected in series. Each vibration pump unit has a fluid transfer pipe, a vibrator mounted on the outer peripheral surface of the fluid transfer pipe and adapted to cause the transfer pipe to vibrate in a respiring manner, an inner peripheral electrode on the inner peripheral surface of the vibrator, an outer peripheral electrode on the outer peripheral surface of the vibrator, a high-frequency voltage applying device for applying a high-frequency voltage between the inner peripheral electrode and the outer peripheral electrode thereby causing the vibrator to vibrate in respiring manner, and a fluid diode exhibiting resistance to reversing of the fluid and connected to the fluid outlet of the fluid transfer pipe in such a manner as to permit the fluid to be discharged from the fluid pipe. The adjacent vibration pumps operate with a predetermined phase difference therebetween.