Arrangement for optically measuring the profile of a radiation reflecting surface

摘要

An optical height measuring arrangement is described in which the radiation reflected from the surface to be measured is projected towards a position-dependent radiation-sensitive detection system via a lens system. The direction of the beam which is incident on the surface is varied at a high frequency and the amplitude of the output signal of the detection system is a measure of the distance to be measured. When two detection systems are employed it is also possible to measure the surface roughness.