摘要 |
PURPOSE:To obtain a superconductive thin film with high stability by depositing the first film which is an oxide containing at least two kinds of specific elements and mainly made of a composite compound with the specific element ratio and the second film with the oxygen feeding property in layers on a crystalline substrate. CONSTITUTION:The first film 12 mainly made of a composite compound which is an oxide containing at least the element A and element B and Cu at the mole ratio of elements of 0.5<=[(A+B)/Cu]<=2.5 and the second film 13 with the oxygen feeding property are deposited on a substrate 11 in turn in layers, where A is at least one kind of Sc, Y, and lanthanoide series elements (atomic number 57-71), and B is at least one kind of IIa group elements. A superconductive thin film with high stability is thereby obtained. |