| 摘要 |
PURPOSE: To make the manufacture of an infrared detector element array easier, to improve the reliability of the array, and to reduce cross talk by providing an infrared-ray collecting area larger than element bodies in front of each element body and laying the wiring to each element body in a space formed under the collecting area. CONSTITUTION: Element bodies 11, 11,... made of an LMZT ceramic pyroelectric material are arranged on a polyimide film (substrate) 10. Infrared-ray collecting heat fins 21, 21,... are provided on the front surfaces of the element bodies 11 through a common electrode 22 and the rear surfaces of the bodies 11 are connected to conductors 13, 13,... formed on the substrate 10. Sine a capacitance change occurs between electrodes 12 and 14 due to infrared absorption, the infrared absorption can be detected. The fins 21 are made larger than the bodies 11 and the conductors 13 are arranged below the projecting peripheral edges 23 of the fins 21. Since the distances between the bodies 11 and wiring 13 and between wires of the wiring 13 can be made longer the manufacture of an infrared detector element array becomes easier and the reliability of the array is improved. In addition, since the capacitance between each body 11 can be reduced, the occurrence of cross talk can also be reduced. |
