FORMATION OF FINE PATTERN,申请号JP19870208726-传众专利搜索

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发明名称	FORMATION OF FINE PATTERN
摘要
申请公布号	JPS6450531(A)	申请公布日期	1989.02.27
申请号	JP19870208726	申请日期	1987.08.21
申请人	NEC CORP	发明人	MATSUMOTO HIROSHI
分类号	H01L21/308;H01L21/283;H01L21/285;H01L21/302;H01L21/3065	主分类号	H01L21/308
代理机构		代理人
主权项
地址

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