| 摘要 |
PURPOSE:To stabilize a crystal grain boundary by making an oxide superconductive material a thin film structure, and a multilayer structure of the material and metal. CONSTITUTION:A target for forming an oxide superconductive thin film and a target for forming a metallic thin film are made to be sputtered, a formed surface is rotated, and the oxide superconductive thin film and the metallic thin film and laminated in multilayer on a substrate. The oxide superconductive thin film formed has the formula of (A1-xBx)yCuzOwXv, where x=0.1-1.0, y=2.0-4.0, z=1.0-4.0, w=4.0-8.0, and v=0-3.0, A is an element selected from one or plural species of the element periodic table IIIa group, B contains an element selected from one or plural species of the element periodic table IIa group, and X contains an element of one or plural species selected from Si, Ge, Sn, Pb, In, pr Sb. And the main component of the metallic thin film formed is copper, silver, or their compound. By the way, the temperatures of the formed surface is made at room temperature -700 deg.C. |
