MANUFACTURE OF SILICON THIN FILM,申请号JP19870207511-传众专利搜索

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发明名称	MANUFACTURE OF SILICON THIN FILM
摘要
申请公布号	JPS6450532(A)	申请公布日期	1989.02.27
申请号	JP19870207511	申请日期	1987.08.21
申请人	TOKAI RIKA CO LTD	发明人	SHINKAI KOUICHI;IWATA HITOSHI
分类号	H01L21/306;G01P15/08;H01L29/84	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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