INSPECTION OF INTEGRATED CIRCUIT AND DEVICE THEREFOR,申请号JP19870207221-传众专利搜索

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发明名称	INSPECTION OF INTEGRATED CIRCUIT AND DEVICE THEREFOR
摘要
申请公布号	JPS6450435(A)	申请公布日期	1989.02.27
申请号	JP19870207221	申请日期	1987.08.20
申请人	KAWASAKI STEEL CORP	发明人	KANEKO YOSHIO
分类号	G01R31/26;H01L21/66	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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