| 摘要 |
<p>PURPOSE:To prevent the contamination of the surface of a single crystal wafer, by fixing and projecting supporting pins for the single crystal wafer from the surface of a steel belt, which is wound around a roller, and driving and rotating the roller through magnetic couplings from the outside of a vacuum partitioning wall. CONSTITUTION:A path (a) in a vacuum state is partitioned and formed with a cylindrical partitioning wall 1. A roller 3 is laterally mounted on a shaft at both right and left opening parts of the partitioning wall 1 through a mounting stage 2. A stainless steel belt 5 is wound around the roller 3. The rotation of a motor is transmitted to a power transmitting mechanism to the roller 3 through magnetic couplings 7, which are arranged at the inside and the outside of the partitioning wall 1 so as to face each other. The steel belt is turned in an endless mode. A plurality of supporting pins 11 as one set, which support a single crystal wafer 12, are fixed on the steel belt 5. Therefore, the outer edge of the single crystal wafer 12 is supported with the supporting pins 11. Then, the wafer is conveyed in an approximately noncontact state. Thus, the wafer can be safely conveyed in the vacuum state without the effects of impurities, oxygen and the like.</p> |
