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发明名称
APPARATUS FOR LIQUID GROWTH OF SEMICONDUCTOR CRYSTAL
摘要
申请公布号
JPS6450519(A)
申请公布日期
1989.02.27
申请号
JP19870207753
申请日期
1987.08.21
申请人
STANLEY ELECTRIC CO LTD
发明人
KANBA TAKAHIRO
分类号
H01L21/208;C30B19/06
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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