发明名称 MANUFACTURE OF HYBRID INTEGRATED CIRCUIT DEVICE AND SUBSTRATE
摘要 <p>PURPOSE:To enable highly accurate detect ion/of a position and to improve the yield rate of devices, by forming marks for detecting the position of a substrate simultaneously with forming first and conductor layers by printing of conductive paste. CONSTITUTION:Conductive paste, which is detected in a white color after baking, is printed on the main surface of a substrate 4, which is detected in a white color. Thus, a wiring pattern is formed. At the same time, position detecting conductor layers 5 are formed with the conductive paste. When the position detecting conductor layers 5 are formed, the conductor paste is not printed in an X shape, and thin grooves 6 are formed. The grooves are used as X-shaped marks 3. When light is projected in the slant direction to the marks 3, the grooves 6 are detected in a black color. Therefore, the contrast in black and white at the mark becomes clear, and the accurate position of the substrate 4 can be detected. Thus, succeeding printing and the yield rate in assembling can be improved.</p>
申请公布号 JPS6450438(A) 申请公布日期 1989.02.27
申请号 JP19870206319 申请日期 1987.08.21
申请人 HITACHI LTD;HITACHI TOBU SEMICONDUCTOR LTD 发明人 YAMADA MASAAKI;USUI TOSHIO;ARIGA NOBORU
分类号 H01L21/68;H05K3/12 主分类号 H01L21/68
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