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经营范围
发明名称
METHOD FOR FORMING POSITIVE RESIST PATTERN
摘要
申请公布号
JPS6449039(A)
申请公布日期
1989.02.23
申请号
JP19870205155
申请日期
1987.08.20
申请人
TOSOH CORP
发明人
TSUTSUMI YOSHITAKA;KIYOTA TORU;MATSUMURA KOUZABUROU;NAGAOKA TSUNEKO;YANAGIHARA TOSHIMITSU
分类号
G03F7/039
主分类号
G03F7/039
代理机构
代理人
主权项
地址
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