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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6449224(A)
申请公布日期
1989.02.23
申请号
JP19870207196
申请日期
1987.08.19
申请人
NEC KANSAI LTD
发明人
MINO TATSUJI
分类号
H01L21/3205;H01L21/28
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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