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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6449225(A)
申请公布日期
1989.02.23
申请号
JP19870205181
申请日期
1987.08.20
申请人
NEC CORP
发明人
NAGASAWA EIJI
分类号
H01L21/768;H01L21/28;H01L21/3205;H01L23/52
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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