发明名称 |
CYCLIC OR BICYCLIC ALUMINIUM, GALLIUM OR INDIUM ORGANIC COMPOUNDS AND THEIR USE FOR VAPOUR DEPOSITION OF METALS ON SUBSTRATES |
摘要 |
The invention concerns organometallic compounds which are intramolecularly stabilized and have a cyclic or bicyclic structure and their use for manufacturing thin films and epitaxial layers by vapour deposition. The organometallic compounds have the formula (I), where M = Al, In or Ga; Y = N, P, As or Sb and the symbols R<1>, R<2>, M, N and o have the meaning given in claim 1. |
申请公布号 |
WO8901479(A1) |
申请公布日期 |
1989.02.23 |
申请号 |
WO1988EP00674 |
申请日期 |
1988.07.26 |
申请人 |
MERCK PATENT GESELLSCHAFT MIT BESCHRAENKTER HAFTUNG |
发明人 |
HOSTALEK, MARTIN;POHL, LUDWIG;ERDMANN, DIETRICH;SCHUMANN, HERBERT;HARTMANN, UWE;HEYEN, MEINO;JUERGENSEN, HOLGER |
分类号 |
C30B29/40;C07F5/00;C07F5/06;C23C16/18;C23C16/20;(IPC1-7):C07F5/00 |
主分类号 |
C30B29/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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