| 摘要 |
A multiplicity of flying elements are produced by providing a substrate with a covering film and a multiplicity of microstructures and then dividing it up. According to the invention, part of the covering film (4) is removed by lapping, then the remaining part of the covering film (4) is chemically dissolved and then the exposed surface of the substrate (2) is polished. Subsequently, the substrate (2) is provided once again with a covering film (4) and microstructures (6). These measures have the effect of producing a completely planar surface of low roughness, necessary for the microstructures (6). <IMAGE>
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