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经营范围
发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6448410(A)
申请公布日期
1989.02.22
申请号
JP19870204228
申请日期
1987.08.19
申请人
HITACHI LTD
发明人
KOIKE YOSHIHIKO;OKAJIMA YOSHIAKI
分类号
H01L21/20;H01L21/263;H01L21/268
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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