METHOD FOR CORRECTING ACTIVE MATRIX ARRAY

摘要

PURPOSE:To correct an active matrix array by disconnecting a defective thin film transistor TFT from the 1st picture element electrode and impressing a voltage between the 2nd picture element electrode adjacent to said electrode and the conductive connecting wiring thereby inducing dielectric breakdown between the connecting wiring and the 2nd electrode and connecting the picture element electrodes when the defective TFT arises in the above-mentioned array. CONSTITUTION:The 1st picture element electrode 1a is formed to the active matrix array and the 2nd picture element electrode 1c adjacent to the electrode 1a is electrically connected via an insulator film. A 1st electrical connecting means (probe) 16 is brought into pressurized contact with the surface of the conductive connecting wiring 14 superposed perpendicularly on this electrode 1c to deform the wiring 14. A 2nd probe 17 is brought into pressurized contact with the electrode 1c and the voltage is impressed between the probes 16 and 17 by a voltage impressing means 18 via a switch 19. The dielectric breakdown is generated in the insulator film 2 and the electrodes 1a and 1c are electrically connected. The correction of the defect is thus executed at a low cost.