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发明名称
AUTOMATIC GENERATION OF TEST PATTERN
摘要
申请公布号
JPS6447974(A)
申请公布日期
1989.02.22
申请号
JP19870205512
申请日期
1987.08.18
申请人
MITSUBISHI ELECTRIC CORP
发明人
KANBE KOHEI
分类号
H01L21/66;G01R31/28;G01R31/3183;G06F17/50
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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